login
Updated 11/28/2023
3

Why a water fine filter can result in problems

Anatoly Agulyansky avatar
Team Lead
anatoly
Lehavim, Israel

Alex Agulyansky avatar
Contributor
alex
Vancouver, BC, Canada

Login to comment

Similar projects

Wet cleaning is widely used in microchip manufacturing. Single wafer equipment is working as follows. A wafer rotates, and chemistry is poured from a movable nozzle. Water rinsing is performed at the end of the process. Loading of a new batch of the chemistry resulted in excursion - a strongly increased amount of defects was observed on the wafer after the processing. The project is dedicated to the failure analysis and creation of innovative solutions.

Anatoly Agulyansky avatar
Anatoly Agulyansky
Richard Platt avatar
Max 123 123 K avatar
Mike Agulyansky avatar
Alex Agulyansky avatar

The process is related to microelectronics - microchip manufacturing. The purpose of the process is to create a SiO2 layer on the surface of a Si wafer. Equipment: Vertical furnace to heat the wafers in the Q2 atmosphere and perform oxidation on the wafer surface. Process: The oxidation occurs on the front side and on the back side of the wafer Requirements: Create a SiO2 thin layer with a certain thickness and low sigma - low standard deviation of the thickness between the wafers and within the wafer Failure: Wafers from the lower zone have higher thickness and significantly higher within wafer sigma (standard deviation of the thickness within the wafer)

Anatoly Agulyansky avatar
Anatoly Agulyansky
Mike Agulyansky avatar
Alex Agulyansky avatar

Flash heating of a wafer is widely used in microchip manufacturing. The purpose of the process is to prevent the diffusion of ions and atoms. During the flash process, a wafer breakage occurs. The project's purpose is to learn and understand the mechanism of the wafer breakage and propose the solutions to prevent the wafer breakage

Anatoly Agulyansky avatar
Anatoly Agulyansky