login
Updated 02/22/2024
10

Wafer breakage at flash heating

Model of the failure

The wafer flies and hits the pins due to the pressure differences that occur at flash.

Possible solutions

  1. Eliminate a wafer movement and flying - fixate a wafer with a vacuum chuck
  2. Eliminate the pressure difference - reduce the pressure, perform the process at low pressure
  3. Eliminate hit - redesign centering pins to avoid hitting of the wafer during its movement


OLD DESIGN NEW DESIGN



Login to comment

Similar projects

Wet cleaning is widely used in microchip manufacturing. Single wafer equipment is working as follows. A wafer rotates, and chemistry is poured from a movable nozzle. Water rinsing is performed at the end of the process. Loading of a new batch of the chemistry resulted in excursion - a strongly increased amount of defects was observed on the wafer after the processing. The project is dedicated to the failure analysis and creation of innovative solutions.

Anatoly Agulyansky avatar
Anatoly Agulyansky
Richard Platt avatar
Mike Agulyansky avatar
Alex Agulyansky avatar
Max 123 123 K avatar

The process is related to microelectronics - microchip manufacturing. The purpose of the process is to create a SiO2 layer on the surface of a Si wafer. Equipment: Vertical furnace to heat the wafers in the Q2 atmosphere and perform oxidation on the wafer surface. Process: The oxidation occurs on the front side and on the back side of the wafer Requirements: Create a SiO2 thin layer with a certain thickness and low sigma - low standard deviation of the thickness between the wafers and within the wafer Failure: Wafers from the lower zone have higher thickness and significantly higher within wafer sigma (standard deviation of the thickness within the wafer)

Anatoly Agulyansky avatar
Anatoly Agulyansky
Mike Agulyansky avatar
Alex Agulyansky avatar

The number of particles is a critical parameter for microchip manufacturing. Each, even a very small particle, can potentially destroy a die. Therefore filters are widely used. Water is always filtered through fine filters to reduce the number of particles. Nevertheless, if the filter is too fine, it could cause a problem. This issue was investigated with the help of Functional Modeling. Possible solutions were generated using 40 Inventive Principles.

Anatoly Agulyansky avatar
Anatoly Agulyansky
Alex Agulyansky avatar