Updated 12/5/2022

Wafer cleaning issues at the wet process

Improve the process to enhance the effectiveness of the cleaning with the chemistry

Anatoly Agulyansky
Jan 15 2022 10:02:20 am

Improve the rinsing process to ensure the defects removal

Anatoly Agulyansky
Jan 15 2022 10:03:47 am

Try to eliminate the wasting. Do we really need this?

Anatoly Agulyansky
Jan 15 2022 10:04:17 am

To increase the density of the chemistry by temperature reduction

Anatoly Agulyansky
Jan 15 2022 10:04:38 am

Prevent evaporation of the chemistry from the wafer

Anatoly Agulyansky
Jan 15 2022 10:05:04 am

Increase the pressure in the chamber

Anatoly Agulyansky
Jan 15 2022 10:07:06 am

Principle #7 – Nesting dolls – place one object inside another.

The idea that is generated from this principle is as follows.

Why do we use only one single nozzle? Why not shower? The shower has several halls – a lot of nozzles. More than that, we can make halls with different diameters in the center and in the periphery of the shower to ensure equal coverage of the disc with the chemistry.

So, the idea is to replace the single nozzle with the shower

Anatoly Agulyansky
Jan 15 2022 10:44:42 am

Principle #15 – Dynamism – change an object from rigid to movable or adaptive

The idea that is generated is as follows:

Replace the constant flow of the chemistry with variable flow, especially in the and of the process, to ensure defects removal from the disc.

So, the idea is to change (even make pulses) flow while the cleaning process.

Anatoly Agulyansky
Jan 15 2022 10:53:34 am

Principle #13 – The other way around – Turn the object “upside-down”

This is a great tip. Indeed, why the disk is kept “face-up” during the washing process?

It would be much better to keep the disc “face down” to improve the removal of the defects from the surface.

So, the idea is to keep the wafer “face down” during the washing process

Anatoly Agulyansky
Jan 15 2022 11:11:46 am

Principle #16 – Partial or accessive action – do slightly more or slightly less

If 100 percent of an object is hard to achieve using a given solution method then, by using 'slightly less' or 'slightly more' of the same method, the problem may be considerably easier to solve.

A wafer is not contaminated equally: there are some areas with more defects and some areas with fewer amount of defects

The idea is to use the shower with a graduated flow - the more the defects the higher the flow

Anatoly Agulyansky
Jan 15 2022 11:12:39 am

The general conclusion is to eliminate the system of the air supply and exhaust. Let air enter the chamber and convert exhaust to drain with very little under-pressure. The will stabilize the performance, reduce the cost and make the system more simple.

Anatoly Agulyansky
May 7 2022 3:53:33 pm

The wafer is contaminated not equally. Use special cleaning on the areas that are more contaminated

Anatoly Agulyansky
May 10 2022 1:22:31 pm

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Updated 09/21/2022

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